[Left] Semiconductor layers are stacked using concentric metalenses as alignment marks. [Right] Light shines through these marks to project a hologram. The alignment or misalignment of the lenses ...
(Nanowerk News) Researchers from SEMATECH's 3D Interconnect program based at the College of Nanoscale Science and Engineering's (CNSE) Albany NanoTech Complex have reported advances in wafer-to-wafer ...
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